The effect of low and high temperature anneals on the hydrogen content and passivation of Si surface coated with SiO2 and SiN films

TitleThe effect of low and high temperature anneals on the hydrogen content and passivation of Si surface coated with SiO2 and SiN films
Publication TypeJournal Article
AuthorsEbong, A, Doshi, P, Narasimha, S, Rohatgi, A, Wang, J, EL-Sayed, MA